NAME : Chang Chia Chang

SEX : Male

RACE : Chinese

RESIDENTIAL LOCATION : Hsin-Chu

DATE of BIRTH : 13 October 1965

AGE : 45

NATIONALITY : Taiwan, ROC

MARITAL STATUS : Married with 3 children

DRIVING LICENCE : Valid driving license (Possesses own car)

MILITARY SERVICE : August 1988 to 1990

LANGUAGES / DIALECTS : Written : Chinese & English ; Spoken : Mandarin, English & Taiwanese dialects

1991 to 1993 TSING-HUA UNIVERSITY, HSINCHU, TAIWAN

Master Degree in Material Science

Major in Semiconductor Material field

Thesis Title : The study of Si Deposition on Si and SiO2 by Low-Temperature (<400C)

PECVD from SiH4 / H2 and SiH4 / Ar / H2 Gases

Key word : Selective Epitaxial Growth (SEG)

1984 to 1988 TAM-KEN UNIVERSITY, TAIPEI, TAIWAN Bachelor Degree in Physical Science

1981 to 1984 FENG-SHAN HIGH SCHOOL, KAOHSIUNG, TAIWAN

2000 to Present Applied Materials Taiwan. A US based major semiconductor equipment company with a stsff strength of less than 1000. Front-End Product Process Engineer.

Job unction:

1. Responsible for new technology development and product penetration in Taiwan.

2. Key semiconductor Logic & DRAM manufacturing company process support.

3. key experience are including

Epi related (strained Si epi, selective epi, standard Epi, SiGeB..) process. Advanced Gate stack integration application: Plasma nitrided oxide process. RTP anneal & oxidation process. Non-Si LED process development.

1996 to 2000 TAISIL ELECTRICAL MATERIALS CORP.

A Taiwanese based silicon wafer manufacturing company with a staff strength of 500 EPI Process Engineer reporting to Technical Manager Duties : 1. Responsible for evaluation & start-up of New process equipment & instrumentation. 2. Introduction of new products and processes to mass production. 3. Stabilization of production processes. 4. Optimization of processes and equipment regarding product quality and quantity (yield). 5. Responsible for research & development of new processes. 6. Improvement & evaluation on quality / throughput of equipment, Epi substrate, etc. 7. Epi Process technology transfer and management.

I (Chang Chia Chang, Vincent) am 45 years of age & married with 3 children is a Taiwanese citizen.

I joint AMAT Taiwan & has served as the Front-End Product Technologist since 2000. In that function I am responsible for new technology development and product penetration in Taiwan. My key experience are including Epi related (strained Si epi, selective epi..) process & plasma nitrided SiO2 process for advanced single wafer integration application. LED process development also extend my process scope.

Prior to joining AMAT, I worked for 6 years at EPISIL Technology Corp.& Taisil Electronic Material Corp. At which I had responsibility to manage the technology development & process engineering covering Epi deposition, surface inspection, thin film deposition and wet cleaning.

I have a master degree in material science from the University of Tsing-Hua, Taiwan.

I am a serious, organized & non-nonsense* person. The established strength of my particular is my experience in silicon wafer Process Engineering as well as my technology management experience. Especially, I am strongly interested in the epitaxy field.

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